HOME > Presentation > Detail(Simulation of single crystal diamond MEMS switch)廖 梅勇, 小出 康夫. COMSOL カンファレンス東京 2011. 2011-12-02.NIMS author(s)LIAO, MeiyongFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-14 11:26:19 +0900 Updated at: 2017-07-10 21:14:09 +0900