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AuthorSONG, Yelim, SHIMAMURA, Kiyoshi, KAWAMURA, Fumio, TANIGUCHI, Takashi, OHASHI, Naoki.
TitleAlN thin film growth by Liquid Phase Epitaxial technique with Sn flux
Event name日本セラミックス協会2018年年会
Year of publication2018
LanguageJapanese
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