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PDA雰囲気ガスがn-β-Ga2O3/Al2O3/Pt MOSキャパシタの電気特性へ及ぼす影響
(Influence of PDA ambient gas on characteristics of n-β-Ga2O3/Al2O3/Pt MOS capacitors)
第67回応用物理学会春季学術講演会. 2020.
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Created at: 2020-09-26 03:00:22 +0900Updated at: 2020-09-26 03:00:22 +0900