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AuthorShinya Fujimoto, TERAJI, Tokuyuki, Toshimichi Ito.
TitleホモエピタキシャルCVDダイヤモンド薄膜の表面 ナノ構造と電気的特性との相関
(Relations between surface nano-structures and electrical properties of homoepitaxial CVD diamond films)
Event name第19回ダイヤモンドシンポジウム
Year of publication2005
LanguageJapanese

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