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Author | Shinya Fujimoto, TERAJI, Tokuyuki, Toshimichi Ito. |
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Title | ホモエピタキシャルCVDダイヤモンド薄膜の表面 ナノ構造と電気的特性との相関 (Relations between surface nano-structures and electrical properties of homoepitaxial CVD diamond films) |
Event name | 第19回ダイヤモンドシンポジウム |
Year of publication | 2005 |
Language | Japanese |