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EBIC法を用いた次世代Si系材料の研究-歪Si薄膜のミスフィット転位の観察・high-k膜のリーク評価

第116回KASTECセミナー. 2007. Invited

NIMS author(s)


    Fulltext and dataset(s) on Materials Data Repository (MDR)


      Created at :2017-02-14 11:38:01 +0900 Updated at :2024-03-05 11:41:25 +0900

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