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TiN下部電極の表面酸化による強誘電体TiN/HfxZr1−xO2/TiNキャパシタの分極疲労の抑制
(Suppression of Fatigue Properties of Ferroelectric TiN/HfxZr1−xO2/TiN Capacitors by Surface Oxidation of TiN Bottom-Electrode)
第28回電子デバイス界面テクノロジー研究会. 2023.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2023-02-24 17:19:41 +0900Updated at: 2023-02-24 17:19:41 +0900