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Siナノ細線へのPおよびBのコドーピングと酸素アニールによるP原子・B原子の偏析挙動
(P and B codoping in Si nanowires and segregation of P atoms and B atoms during thermal oxidation)
春季第55回応用物理学会学術講演会. 2008.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:54:12 +0900Updated at: 2017-07-10 20:09:02 +0900