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Improvement of PBS properties for c- and m-GaN/Al2O3/Pt capacitors using a dummy SiO2 layer

NABATAME, Toshihide, SAWADA, Tomomi, IROKAWA, Yoshihiro, 宮本 真奈美, 三浦 博美, KOIDE, Yasuo, TSUKAGOSHI, Kazuhito.
54th IEEE Semiconductor Interface Specialists Conference. December 13, 2023-December 16, 2023.

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Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2024-01-13 03:09:47 +0900 Updated at: 2024-01-13 03:09:47 +0900

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