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多段ELOによるα型酸化ガリウム結晶の貫通転位密度の低減
(Reduce of the Threading Dislocation Density of a-Ga2O3 by Multi-layered ELO)
第80回応用物理学会秋季学術講演会. 2019.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2019-09-28 23:56:13 +0900Updated at: 2019-09-28 23:56:13 +0900