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Nitrogen diffusion in AlN thin films deposited by a MBE
STAC-4. June 21, 2010-June 23, 2010.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:13:24 +0900Updated at: 2017-07-10 20:50:49 +0900