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EBICとTEMによる絶縁膜破壊したHigh-kゲートスタック構造の観察
(EBIC and TEM observation of physical damages induced by dielectric breakdown in high-k gate stacks)
2010年春季 第57回 応用物理学関係連合講演会. 2010.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:19:10 +0900Updated at: 2017-07-10 20:44:53 +0900