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ReRAM用AlOx薄膜のアモルファス・ナノ構造
(Nano-structural amorphous of AlOx thin film for Resistive Random Access Memory(ReRAM))
2007年秋季第68回応用物理学会学術講演会. 2007.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 05:19:31 +0900Updated at: 2017-07-10 20:00:37 +0900