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Galfenol-Ti-Diamond Multilayer MEMS Resonator for Magnetic Sensor Working up to 500oC

ZHANG, Zilong, SANG, Liwen, ウ ハイファ, Jian Huang, Linjun Wang, KOIZUMI, Satoshi, KOIDE, Yasuo, LIAO, Meiyong.
2019 IEEE International Electron Devices Meeting (IEDM). 2019.

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