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AuthorITAKURA, Akiko, Takagi, Shoji, Gotoh, Testuji, Sakai, Daiki.
TitleStress generation during Hydrogen plasma irradiation on Stainless steel thin film.
(水素照射下でステンレス鋼に発生する表面応力)
Event name8th International workshop on Nanomechanikal Cantilever Sensors
Year of publication2011
LanguageEnglish
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