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GaN系絶縁膜制御技術
(Control techniques of gate dielectrics for GaN-based semiconductors)

応用物理学会 特別シンポジウム:GaNのエピタキシャル成長とデバイス. September 17, 2018-September 20, 2018. Invited

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2018-07-01 16:43:10 +0900Updated at: 2024-03-05 12:20:41 +0900

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