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Elimination of Threading Dislocations in α-Ga2O3 by Double-layered Epitaxial Lateral Overgrowth
(二重ELOによるα-Ga2O3の貫通転位低減)

Author(s)河原克明, OSHIMA, Yuichi, 沖川満, 四戸孝.
Event nameThe 39th Electronic Materials Symposium 第39回電子材料シンポジウム
Year of publication2020
LanguageEnglish

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