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Elimination of Threading Dislocations in α-Ga2O3 by Double-layered Epitaxial Lateral Overgrowth
(二重ELOによるα-Ga2O3の貫通転位低減)
The 39th Electronic Materials Symposium
第39回電子材料シンポジウム. 2020.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2020-10-17 03:00:18 +0900Updated at: 2020-10-17 03:00:18 +0900