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Siナノワイヤの結晶性回復と不純物の活性化
(Crystallization process and reactivation impurity atoms in silicon nanowires)
秋季第72回応用物理学会学術講演会. 2012.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:21:20 +0900Updated at: 2017-07-10 21:28:42 +0900