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FIB基板加工による単結晶膜成長時の基板との歪開放
(Trench Formation for Releasing the Strain between Substrates and Epitaxial Films)
第79回応用物理学会秋季学術講演会. 2018.
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Created at: 2018-07-01 16:43:05 +0900Updated at: 2018-07-01 16:43:05 +0900