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Impact of ALD-ZrO2 nucleation layers on leakage current properties and dielectric constant of ferroelectric HfxZr1−xO2-thin films
36th International Microprocesses and Nanotechnology Conference (MNC 2023). November 14, 2023-November 17, 2023.
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Created at: 2023-11-30 03:15:56 +0900Updated at: 2023-11-30 03:15:56 +0900