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Self-Temperature-Compensated GaN MEMS Resonators through Strain Engineering up to 600 K

SANG, Liwen, サン フアンイン, Xuelin Yang, Tiefu Li, Bo Shen, LIAO, Meiyong.
IEDM 2020. December 12, 2020-December 18, 2020.

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Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2020-12-29 03:00:23 +0900 Updated at: 2020-12-29 03:00:23 +0900

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