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多結晶HfO2薄膜における酸素欠陥の凝集・拡散に関する理論的検討
(Theoretical Study of Oxygen vacancies in Grain in Polycrystalline HfO2 Thin Film)
第79回応用物理学会秋季学術講演会. 2018.
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Created at: 2019-03-04 09:36:48 +0900Updated at: 2019-03-04 09:36:48 +0900