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[Published patent application] プラズモン特性を有する窒化チタン膜及びその製造方法

2019-06-06. 2019085629 (Google Patents) , 7378755

NIMS author(s)

Created at :2023-07-22 21:45:57 +0900 Updated at :2023-07-22 21:45:57 +0900

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