HOME > Published patent applications > Detail[Published patent application] 化合物半導体の気相エピタキシャル成長層の製造法1977-02-08. S52016973 (Google Patents) , 1024536NIMS author(s)Created at :2023-07-22 21:44:05 +0900 Updated at :2023-07-22 21:44:05 +0900