HOME > Published patent applications > Detail[Published patent application] 多層薄膜及びその製造方法2007-11-29. 2007307848 (Google Patents) , 5146866NIMS author(s)WAKAYAMA, YutakaICHINOSE, IzumiCreated at :2023-07-22 21:45:12 +0900 Updated at :2023-07-22 21:45:12 +0900