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[Published patent application] テラヘルツ発振素子、その製造方法、および、テラヘルツ発振装置

2022-03-03. 2022034096 (Google Patents) , 7623670

NIMS author(s)


Created at :2023-07-22 21:46:10 +0900 Updated at :2023-07-22 21:46:10 +0900

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