HOME > Published patent applications > Detail[Published patent application] テラヘルツ発振素子、その製造方法、および、テラヘルツ発振装置2022-03-03. 2022034096 (Google Patents) , 7623670NIMS author(s)TAKEYA, HiroyukiTAKANO, YoshihikoTERASHIMA, KenseiCreated at :2023-07-22 21:46:10 +0900 Updated at :2023-07-22 21:46:10 +0900