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[Published patent application] ウルツ鉱型Ⅲ-Ⅴ族窒化物薄膜とその製造法

2005-03-24. 2005075651 (Google Patents)

NIMS author(s)

Created at :2023-07-22 21:44:54 +0900 Updated at :2023-07-22 21:44:54 +0900

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