HOME > Published patent applications > Detail[Published patent application] 非酸化物基板上の酸化亜鉛薄膜の熱処理方法2005-04-21. 2005108902 (Google Patents) NIMS author(s)HANEDA, HajimeHISHITA, ShunichiSAKAGUCHI, IsaoCreated at :2023-07-22 21:44:54 +0900 Updated at :2023-07-22 21:44:54 +0900