HOME > Published patent applications > Detail[Published patent application] Ti-Zr-Ni系高温形状記憶合金薄膜とその製造方法2002-10-03. 2002285275 (Google Patents) , 3947788NIMS author(s)ISHIDA, AkiraSAWAGUCHI, TakahiroCreated at :2023-07-22 21:44:44 +0900 Updated at :2023-07-22 21:44:44 +0900