HOME > Published patent applications > Detail[Published patent application] 可変容量キャパシタ素子及びキャパシタアレイ2018-02-22. 2018029156 (Google Patents) , 6770736NIMS author(s)AONO, MasakazuTSURUOKA, TohruTERABE, KazuyaTSUCHIYA, TakashiCreated at :2023-07-22 21:45:53 +0900 Updated at :2023-07-22 21:45:53 +0900