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[Published patent application] 基板上に形成させたMoBN膜の表面に窒化ボロンを析出させた積層材料の製造方法

1986-08-28. S61194171 (Google Patents) , 1467158

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    Created at :2023-07-22 21:44:17 +0900 Updated at :2023-07-22 21:44:17 +0900

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