HOME > Published patent applications > Detail[Published patent application] 窒化物半導体装置及び窒化物半導体装置の製造方法2022-06-23. 2022092828 (Google Patents) NIMS author(s)KIMOTO, KojiMITSUISHI, KazutakaHONO, KazuhiroOHKUBO, TadakatsuUZUHASHI, JunCreated at :2023-07-22 21:46:10 +0900 Updated at :2023-07-22 21:46:10 +0900