HOME > Published patent applications > Detail[Published patent application] 化学処理装置用の耐熱部品2010-12-29. EP2447384 (Google Patents) WO2010150636 (Google Patents) NIMS author(s)SAWADA, KotaTODA, YoshiakiKIMURA, KazuhiroCreated at :2023-07-22 21:45:33 +0900 Updated at :2023-07-22 21:45:33 +0900