HOME > Published patent applications > Detail[Published patent application] 膜型表面応力センサーを用いた水素センサー及び水素検出方法2019-03-07. 2019035613 (Google Patents) , 7304606NIMS author(s)ITAKURA, AkikoYOSHIKAWA, GenkiIMAMURA, GakuYAKABE, TaroCreated at :2023-07-22 21:45:57 +0900 Updated at :2023-07-22 21:45:57 +0900