HOME > Published patent applications > Detail[Published patent application] SiC薄膜の作成法2000-03-21. 2000080471 (Google Patents) , 3131773NIMS author(s)OYOSHI, KeijiSUEHARA, ShigeruAIZAWA, TakashiHISHITA, ShunichiCreated at :2023-07-22 21:44:37 +0900 Updated at :2023-07-22 21:44:37 +0900