HOME > Published patent applications > Detail[Published patent application] 薄膜トランジスタ、薄膜トランジスタの製造方法および半導体装置2013-12-19. WO2013187486 (Google Patents) NIMS author(s)NABATAME, ToshihideTSUKAGOSHI, KazuhitoCreated at :2023-07-22 21:45:44 +0900 Updated at :2023-07-22 21:45:44 +0900