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[Published patent application] 集束イオンビーム装置を用いたジョセフソン素子製造方法及びその装置

2004-02-26. 2004063576 (Google Patents)

NIMS author(s)

Created at :2023-07-22 21:44:48 +0900 Updated at :2023-07-22 21:44:48 +0900

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