HOME > Published patent applications > Detail[Published patent application] 半導体装置、半導体装置の製造方法、半導体基板、および半導体基板の製造方法2010-08-16. 201030968 (Google Patents) TW201030968 (Google Patents) NIMS author(s)NARA, JunOHTAKE, AkihiroCreated at :2023-07-22 21:45:29 +0900 Updated at :2023-07-22 21:45:29 +0900