HOME > Published patent applications > Detail[Published patent application] 薄膜トランジスタおよびその製造方法2017-02-23. 2017041646 (Google Patents) , 6296463NIMS author(s)CHIKYO, ToyohiroTSUKAGOSHI, KazuhitoNABATAME, ToshihideCreated at :2023-07-22 21:45:48 +0900 Updated at :2023-07-22 21:45:48 +0900