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集束イオンビームを利用したSEMシリアルセクショニングの観察技法と応用
(Techniques and Applications of FIB-SEM Serial Sectioning Observation )

精密工学会誌 89 [6] 440-443. 2023.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2023-06-15 03:26:58 +0900Updated at: 2024-06-04 11:30:54 +0900

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