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Electron-beam-induced current study of breakdown behavior of high-k gate MOSFETs

SEKIGUCHI, Takashi, CHEN, Jun, TAKASE, Masami, FUKATA, Naoki, CHIKYOW, Toyohiro, Motoyuki Sato, Ryu Hasunuma, Kikuo Yamabe, Yasuo Nar.
SOLID STATE PHENOMENA 461-466. 2010.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2022-09-05 12:28:43 +0900Updated at: 2024-04-02 06:39:45 +0900

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