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電子線誘起蒸着法によるナノ構造物作製とその評価
(Fabrication of nanostructures using an electron beam-induced deposition technique and thier properties)

表面技術 56 [12] 910-912. 2005.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2020-11-20 10:44:54 +0900 Updated at: 2020-11-20 10:44:54 +0900

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