HOME > Books > DetailNano-Micro patterning of Inorganic Thin Films and ParticlesKunihito Koumoto, SAITO, Noriko, Yanfeng Gao, Yoshitake Masuda. Encyclopedia of nanoscience and Nanotechnology 131-183. 2011.NIMS author(s)SAITO, NorikoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-01-08 04:10:50 +0900 Updated at: 2017-04-06 22:10:48 +0900