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Halide Vapor Phase Epitaxy 2—Heteroepitaxial Growth of α- and ɛ-Ga2O3
(ハライド気相成長法2 - α- および ε-Ga2O3 のヘテロエピ成長)

Author(s)OSHIMA, Yuichi.
Publisher nameSpringer
Year of publication2020
LanguageEnglish
ISBN9783030371524

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