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SiO2/4H-SiC における界面準位と界面構造の相関
(Atomic Structures and Interface States Density at SiO2/4H-SiC Interface)

表面と真空 64 [7] 312-317. 2021.

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    Created at: 2021-08-07 03:00:19 +0900Updated at: 2024-07-06 06:35:49 +0900

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