HOME > Article > DetailGrowth and etching characteristics of (001) β-Ga2O3 by plasma-assisted molecular beam epitaxy(プラズマMBEによる (001) b-Ga2O3 の成長)Yuichi Oshima, Elaheh Ahmadi, Stephen Kaun, Feng Wu, James S Speck. Semiconductor Science and Technology 33 [1] 015013. 2018.https://doi.org/10.1088/1361-6641/aa9c4d Open Access Materials Data Repository (MDR) NIMS author(s)OSHIMA, YuichiFulltext and dataset(s) on Materials Data Repository (MDR)MDRavailable Growth and etching characteristics of (001) β- Ga2O3 by plasma-assisted molecular beam epitaxy Created at: 2017-12-20 20:36:34 +0900Updated at: 2024-03-30 00:41:35 +0900