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Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS

Guo Chen, Zilong Zhang, Yasuo Koide, Satoshi Koizumi, Zhaohui Huang, Meiyong Liao.
Diamond and Related Materials 138 110240. 2023.
https://doi.org/10.1016/j.diamond.2023.110240

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    Created at: 2023-12-09 03:14:50 +0900 Updated at: 2025-04-20 07:12:55 +0900

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