HOME > Article > DetailSurface Patterning Using Blister Exfoliation Induced by Electron Irradiation(電子照射を利用したブリスター剥離による表面パターニング)Shinichi Igarashi, Akiko N. Itakura, Masahiro Kitajima. Japanese Journal of Applied Physics 46 [12] 7812-7815. 2007.https://doi.org/10.1143/jjap.46.7812 NIMS author(s)ITAKURA, AkikoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 15:20:05 +0900Updated at: 2024-03-30 02:46:27 +0900