無酸素パラジウム/チタンを用いた新しい非蒸発型ゲッターコーティングの開発，放射光X線光電子分光による表面分析，残留ガス分析，排気速度評価
(Development of a New Nonevaporable Getter Coating Using Oxygen-Free Palladium/Titanium, Surface Analysis by Synchrotron Radiation X-ray Photoelectron Spectroscopy, Residual Gas Analysis, and Evaluation of Pumping Speeds)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2019-10-22 03:00:22 +0900Updated at: 2024-04-02 00:57:03 +0900