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AuthorC. Zborowski, O. Renault, A. Torres, C. Guedj, YAMASHITA, Yoshiyuki, UEDA, Shigenori, G. Grenet, S. Tougaard.
TitleQuantitative determination of elemental diffusion from deeply buried layers by photoelectron spectroscopy
Journal titleJOURNAL OF APPLIED PHYSICS 124 [8] 085115-1-085115-12
ISSN: 10897550 00218979
Year of publication2018
LanguageEnglish
ESI category
DOIhttps://doi.org/10.1063/1.5033453
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