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Quantitative determination of elemental diffusion from deeply buried layers by photoelectron spectroscopy

C. Zborowski, O. Renault, A. Torres, C. Guedj, Y. Yamashita, S. Ueda, G. Grenet, S. Tougaard.
Journal of Applied Physics 124 [8] 085115. 2018.
https://doi.org/10.1063/1.5033453

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