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Characterization of ZnO thin film deposited by electron cyclotron resonance assisted chemical vapor deposition

SAKAGUCHI, Isao, RYOKEN, Haruki, HISHITA, Shunichi, HANEDA, Hajime.
THIN SOLID FILMS 184-187. 2006.

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    Created at: 2022-10-21 22:02:26 +0900 Updated at: 2022-10-21 22:02:26 +0900

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